PM - Positioning Systems

Some examples of PM positioning systems designed to application requirements.

 XY-linear motor stages  Medical science XYZ-stage  Semiconductor XYZ-stage

 XY-linear motor stages

- Linear motor driven
- Travel 200 x 175
- High speed requirement

Medical science XYZ-stage

- Precision ball screw driven
- Travel 50 x 50 x 20 mm
- High speed requirement

 

Semiconductor XYZ-stage 

- Linear piezo motor driven
- UHV 10-9 mbar
- Incl. vacuum chamber

 

 XYZ-piezo stage    XYZ-Phi-Theta-stage

 5-Axis system

- Stroke 1000 x 1000 x 700 mm
- Cleanroom class 6
- Repeatability < 1.5 micron

 

XYZ-piezo stage 

- Piezo motor driven
- Travel 13 x 13 x 10 mm
- UHV Compatible

 

XYZ-Phi-Theta-stage 

- Very compact system
- Repeatability 5 axis < 3 micron
- Integrated motors and encoders

 

 XY-system  XY-stage E-beam  UHV-XY stage

 XY-system

- Stroke 300 x 300 mm
- UHV compatible
- Direct drive

 

 XY-stage E-beam

- Stroke 150 x 150 mm
- Direct Drive System
- Repeatability < 1.5 micron

 

UHV-XY stage

- Stainless steel XY-stage
- UHV compatible
- High temperature compatible

 


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PM - Positioning Systems